상세 규격 표

Cat. No.	Model	Vacuum Range
V08-653-013	201-1TC	0.00001 ~ 760 Torr

Accuracy

1 ~ 99 milliTorr	±2 microns or 20% of Reading
100 ~ 2000 milliTorr	±10% of Reading
2 ~ 6 Torr	±25% of Reading
6 ~ 250 Torr	Continuous and Monotonic
250 ~ 800 Torr	±25% of Reading

• Optional Accessory for Vacuum Control

Optional Accessory for Vacuum Control

Cat. No.	Model	Description
V08-653-050	VLC-201	Vacuum level Control Card
V08-653-053	VAL-VLC-Soft	Upstream vacuum control에 사용되는 Valve
V08-132-248	SEN-531	Thermocouple, Vacuum only 1/8inch Male NPT